DIN DIN 50443-1 Testing of materials for use in semiconductor technology; detection of crystal defects and inhomogeneities in silicon single crystals by X-ray topography

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DIN DIN 50443-1 Document Information:

Title
Testing of materials for use in semiconductor technology; detection of crystal defects and inhomogeneities in silicon single crystals by X-ray topography

Pruefung von Materialien fuer die Halbleitertechnologie; Nachweis von Kristalldefekten und Inhomogenitaeten in Halbleiter-Einkristallen mittels Roentgentopographie; Silicium

Deutsches Institut Fur Normung E.V.

Publication Date:
Jul 1, 1988

Keywords:

Halbleitertechnik

Pruefung

Silicium

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