DIN DIN 50447 Testing of materials for semiconductor technology - Contactless determination of the electrical sheet resistance of semiconductor layers with the eddy-current method

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DIN DIN 50447 Document Information:

Title
Testing of materials for semiconductor technology - Contactless determination of the electrical sheet resistance of semiconductor layers with the eddy-current method

Pruefung von Materialien fuer die Halbleitertechnologie - Kontaktlose Messung des elektrischen Flaechenwiderstandes von Halbleiterschichten mit dem Wirbelstrom-Verfahren

Deutsches Institut Fur Normung E.V.

Publication Date:
Apr 1, 1995

Keywords:

Halbleitertechnologie

Material

Pruefung

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