DIN DIN 50431 Testing of semiconductor materials; measurement of the resistivity of silicon or germanium single crystals by means of the four probe/direct current method with collinear array

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DIN DIN 50431 Document Information:

Title
Testing of semiconductor materials; measurement of the resistivity of silicon or germanium single crystals by means of the four probe/direct current method with collinear array

Pruefung von Materialien fuer die Halbleitertechnologie; Messung des spezifischen elektrischen Widerstandes von Einkristallen aus Silicium oder Germanium mit dem Vier-Sonden-Gleichstrom-Verfahren bei linearer Anordnung der Sonden

Deutsches Institut Fur Normung E.V.

Publication Date:
May 1, 1988

Keywords:

Halbleitertechnologie

Material

Pruefung

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