DIN DIN 50449-2 Testing of materials for semiconductor technology - Determination of impurity content in semiconductors by infrared absorption - Part 2: Boron in gallium arsenide
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DIN DIN 50449-2 Document Information:
Title
Testing of materials for semiconductor technology - Determination of impurity content in semiconductors by infrared absorption - Part 2: Boron in gallium arsenide
Pruefung von Materialien fuer die Halbleitertechnologie - Bestimmung des Verunreinigungsgehaltes in III-V-Verbindungshalbleitern mittels Infrarotabsorption - Teil 2: Bor in Galliumarsenid
Deutsches Institut Fur Normung E.V.
Publication Date:
Jan 1, 1998
Keywords:
- Halbleiter
- Halbleitertechnologie
- Pruefung
- Verunreinigung
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