DIN DIN 50435 Testing of semiconductor materials; determination of the radial resistivity variation of silicon or germanium slices by means of the four-probe/direct current method

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DIN DIN 50435 Document Information:

Title
Testing of semiconductor materials; determination of the radial resistivity variation of silicon or germanium slices by means of the four-probe/direct current method

Pruefung von Materialien fuer die Halbleitertechnologie; Bestimmung der radialen Variation des spezifischen elektrischen Widerstandes an Silicium- oder Germanium-Scheiben mit dem Vier-Sonden-Gleichstromverfahren

Deutsches Institut Fur Normung E.V.

Publication Date:
May 1, 1988

Keywords:

Halbleitertechnologie

Material

Pruefung

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